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Table of Contents
Background and Overview
Operations
Reasons to Change
P2 Opportunities
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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

Draft Strategy for National Clean Water Industrial Regulations
Abstract: EPA's Draft Strategy for National Clean Water Industrial Regulations. Includes info on regulations and effluents associated with semiconductor manufacturing.
Source: US Environmental Protection Agency
URL: http://www.epa.gov/EPA-WATER/2002/November/Day-29/w30262.htm

International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF]
Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities.
Source: SEMATECH
URL: http://www.itrs.net/Links/2005ITRS/ExecSum2005.pdf

PFC Reduction / Climate Partnership for the Semiconductor Industry
Abstract: EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supports the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy.
Source: Environmental Protection Agency
URL: http://www.epa.gov/semiconductor-pfc/

SEMATECH Position Statement Regarding The Business Case for the Continued Need of PFOS [PDF]
Abstract: Granting the semiconductor industry an exemption from the restrictions on the use of PFOS, a critical substance in semiconductor manufacturing, is based on the industry’s ability to tightly control and limit total use of the substances. The semiconductor manufacturing industry is attempting to reduce PFOS by developing alternatives.
Source: SEMATECK
URL: http://www.pops.int/documents/meetings/poprc/submissions/Com
ments_2006/sia/PFOS%20Business-Technology%20Issue%20fina
l%2011-24-04.PDF

Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector [PDF]
Abstract: EPA’s technical report describes perfluorinated carbon (PFC) based heat transfer fluids, their common uses in electronics manufacturing, and estimates emissions to the atmosphere. The heat transfer fluids discussed here are powerful greenhouse gases, often thousands of times stronger than carbon dioxide (CO2), and once released to the atmosphere are estimated to persist for more than two thousand years. (PDF)
Source: Environmental Protection Agency
URL: http://www.epa.gov/semiconductor-pfc/documents/pfc_heat_tran
fer_fluid_emission.pdf

 


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Hub Last Updated: 3/11/2013