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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute

Efficient Water Use for Texas: Policies, Tools, and Management Strategies
Abstract: Disccusses why and how semiconductor fabrication plants are in an ideal position to enact sequential water reuse. Cites successes. (By Gerston, MacLeod, & Jones).
Source: Texas Agricultural Experiment Station at Texas A&M University.

High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve
Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau.
Source: Lower Colorado River Authority (LCRA)

LSI Logic - Green Permit Annual Report [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation

Recycle Spent Rinse Waters with Electrodeionization (EDI) [PDF]
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories

Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference

Reducing Water Usage in Semiconductor Manufacturing
Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R)
Source: CleanRooms

Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12

UltraPure Water Recycle Strategy [PDF]
Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova.
Source: Semiconductor Environmental, Safety and Health Association

Ultrapure Water: Rewards of Recycling
Abstract: Benefits of recycling water in semiconductor fabs. Semiconductor International, (February 1998): 71-76. (Not available online).

Water Usage Reduction in a Semiconductor Fabricator (Abstract Only)
Abstract: Actual (by Klusewitz & Veigh) article describes methodology and results to reduce the ultra pure water usage in the Fairchild Mountaintop 6" fab.
Source: Congrès ACMS 2002


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Hub Last Updated: 3/11/2013