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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
First Use of Energy for All Purposes (Fuel and Nonfuel)
Abstract: Excel spreadsheet of energy uses for industry sectors - national and regional data.
Source: Excel File (PPRC)
450mm: What Will It Cost To Get There?
Abstract: Issues for the industry to convert from the current 300mm wafer to a future 450mm wafer, slated for 2012. Historically, changing from one wafer size to the next has been very expensive and results in inefficiencies and more resource requirements.
Source: Future Fab International (Vol 20)
Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute
Enabling Energy Efficiency in Semiconductor Manufacturing
Abstract: Article discusses activities undertaken by Texas Instruments to continue reducing the amount of energy usage in its facilities.
Energy Efficient Cleanroom Information Site – A Technical Perspective
Abstract: Opportunities to reduce energy consumption by half, save processing water, and minimize use of hazardous chemicals by applying state-of-the-art resource-efficiency techniques to silicon production and semiconductor fabrication facilities.
Source: Lawrence Berkely Lab
International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF]
Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities.
Measuring and Managing Energy Use in Cleanrooms [PDF]
Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al.
Source: HPAC Engineering
SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R).
Source: California Department of Toxic Substances Control
Significant Cost Savings in Energy Reduction
Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems.
Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
U.S. Greenhouse Gas Inventory Reports-INVENTORY OF U.S. GREENHOUSE GAS EMISSIONS AND SINKS: 1990-2006
Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing.
Source: Environmental Protection Agency
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The Semiconductor Manufacturing Topic Hub™ was developed by:
Hub Last Updated: 3/11/2013